The several applications for batteries demand ongoing innovation and new energy technologies as attractive alternatives for energy storage. Batteries are now an essential component of modern life, used in everything from energy reservoirs for renewable energy sources to smart devices like electric automobiles and smartphones. Solid state batteries are now attracting more and more interest due to their potential to replace traditional batteries as a new generation device promising both, more safety and higher performances. The reduced flammability is attributed to solid state batteries as their electrolyte mostly composes of ceramic, polymeric or composite (ceramic-polymeric) materials. In this work, metal oxide nanostructures will be used as coatings on electrodes with application in solid state batteries. The presentation of different metal oxide coatings will be achieved by using volatile precursor gas phase deposition methods such as the plasma enhanced chemical vapour deposition (PECVD). In this context, the interfacial materials and composite electrolyte structures are investigated for their changes and influences on the performance of the batteries.